Trade Agreement: CETA / WTO-AGP / NAFTA / CFTA / FTAs with Peru / Colombia / Panama / Korea
Tendering Procedures: All interested suppliers may submit a bid
Competitive Procurement Strategy: Lowest/Lower Bid
Comprehensive Land Claim Agreement: No
Nature of Requirements:
Laboratory Equipment and Supplies
31184-180510/B
Courteau, Robert
Telephone No. - (343) 550-1614
Definition of the requirement
The Canadian Photonics Fabrication Centre (CPFC) provides a "one stop shop" for world-class engineering and manufacturing services, commercial grade prototyping and pilot-run production facilities. The CPFC fabrication lab uses a variety of specialized equipment during the manufacturing process of these photonic devices. The Photolithography section is required to complete optical inspections at many different process steps and require an additional automated wafer handler and inspection microscope combination to support the additional operations requirement.
Microscope Mandatory Specifications
1. Stage movement to be capable of 6"x6" manual (non-motorized)
2. The tool(s) set must be configurable to process 3",4",6" wafers
3. The tool(s) must have manual focus capability
4. The tool(s) must have LED lighting
5. Microscope must have the capability of several magnifications
6. Requires objectives 2.5x, 5x, 10x, 20x, 50x, 100x
7. Long working distance objectives required
8. All objectives to be setup parfocal
9. To increase speed of the system nose piece is to be motorized
10. Microscope must have erect imaging
11. The Microscope will require bright fields, dark field
12. Filters required: Polarizer, DIC
13. Neutral density filter ND4, ND16,GIF, UV Sharp cutoff, colour balanced
14. The microscope must be equipped with a digital camera
15. The microscope must be capable of split view to allow operator to view image through the microscope and a video/camera view
16. Camera to have measurement software
Auto Loader Mandatory Specifications
1. Tool must be capable of handling a variety of wafer sizes and types
2. The tool must be able to handle Silicon as well as InP, Ge and GaAs wafers of standard thicknesses
3. The tool set must be capable of processing 3",4",6" wafers. The elevator to have sensors for 3",4",6" and cassettes
4. Wafer handler to detect empty and cross slotted wafers
5. Microscope and wafer handling to be integrated together
6. No setup required for changeover from one size to another (3". 4")
7. Auto Loader to be capable of handling one single cassette.
More details can be found in the solicitation documents.
Delivery Date: Above-mentioned
The Crown retains the right to negotiate with suppliers on any procurement.
Documents may be submitted in either official language of Canada.
