University of Calgary - Advanced Contract Award Notice / Notice of Proposed Procurement - Inductively Coupled Plasma Reactive Ion Etch System and Chemical Vapour Deposition System

The University of Calgary (UCalgary) intends to purchase the PlasmaPro 100 Cobra 300 ALE inductively-coupled plasma reactive ion etching and the PlasmaPro 100 inductively-coupled chemical vapour deposition systems from Oxford Instruments America, Inc. PlasmaPro 100 process modules are built on 150mm wafer platforms, and offer excellent uniformity and high throughput processes on a range of applications. UCalgary Department of Physics and Astronomy is seeking to purchase these two systems from the same vendor to ensure compatibility in software and maintenance. To the department’s knowledge, the PlasmaPro 100 Cobra 30 ALE and ICP-CVD are the only systems that can meet their requirements for precise etching and materials growth capabilities, given their focus on quantum devices and materials.