CD-SEM et FE-SEM

Trade Agreement: CETA/WTO-AGP/CPTPP/CFTA/FTAs with Peru/Colombia/Panama/Korea/UK
Tendering Procedures: Generally only one firm has been invited to bid
Non-Competitive Procurement Strategy: Exclusive Rights
Comprehensive Land Claim Agreement: No
Vendor Name and Address:
Hitachi High-Technologies Canada Inc
89 Galaxy Blvd.
Suite 14
Rexdale Ontario
Canada
M9W6A4
Nature of Requirements:

CD-SEM and FE-SEM

31184-226592/A
Van Den Hanenberg, Stephen
Telephone No. 343-540-8371

GSIN: N6640

1. Advance Contract Award Notice (ACAN)
An ACAN is a public notice indicating to the supplier community that a department or agency intends to award a contract for goods, services or construction to a pre-identified supplier, thereby allowing other suppliers to signal their interest in bidding, by submitting a statement of capabilities. If no supplier submits a statement of capabilities that meets the requirements set out in the ACAN, on or before the closing date stated in the ACAN, the contracting officer may then proceed with the award to the pre-identified supplier.

2. Definition of the requirement
The National Research Council Canada (NRC) has a requirement for automated critical dimensioning capability tools to support their expanding foundry operations. The Hitachi CD-SEM CS4800 and a complementary Hitachi SU8600 FE-SEM are required to increase throughput and enhance the Foundry Quality Assurance program. The CD-SEM must process cassettes of multiple wafer sizes concurrently at 3 and 4 inch diameters and share a common data acquisition algorithm with the SU8600 for seamless correlation of the critical dimension measurements between the CD-SEM (Critical Dimension Scanning Electron Microscope) and FE-SEM (Field Emission Scanning Electron Microscope) platforms.

The Hitachi CD-SEM CS4800 will be used for top-down measurements at extreme magnifications (up to 300,000 times) at very high resolution and very high repeatability. The CD-SEM will incorporate cassette based automation for higher throughput and will be used to define measured surface topography and composition.

To meet NRC’s clients’ needs for semiconductor photonic and electronic devices, the Hitachi CS4800 CD-SEM and Hitachi SU8600 FE-SEM are much needed and will provide multi-wafer size user configurability. The CS4800 CD-SEM’s user configurability will allow for cassette based CD measurements on two different wafer sizes and different wafer types such as Indium Phosphide (InP), Gallium Arsenide (GaAs), Silicon (Si), Silicon Carbide (SiC) and Gallium Nitride (GaN). Acquiring these tools will allow NRC to support the strategic migration plan to move CD dimensioning on wafer platforms from the current cassette based 3" wafer line to a sustainable cassette based 4" wafer line.

3. Criteria for assessment of the Statement of Capabilities (Minimum Essential Requirements)
Any interested supplier must demonstrate by way of a statement of capabilities that its system meets the following requirements:

Hitachi CD-SEM CS4800

• The CD-SEM must include a Software Data Manager (SDM) to permit critical dimensioning measurements for direct correlation between the CD-SEM and a FE-SEM;
• The CD-SEM footprint must not to exceed 1.2 meters in width and 2.7 meters in depth;
• The CD-SEM must transfer 3" to 8" cassette based wafers of various wafer types, such as but not limited to InP, GaAs, GaN, Si, and SiC;
• The CD-SEM must have two port auto loader configuration;
• The CD-SEM must be configured with 3" and 4" Cassette to Cassette Load ports;
• The CD-SEM must provide automated measurements of cassette based 3" and 4" wafers;
• The CD-SEM must provide user configurable wafer size and cassette size;
• The CD-SEM must have high resolution SEM imaging to 2nm resolution at 800V;
• The CD-SEM must have a magnification range of 4,000x to 300,000x, inclusive;
• The CD SEM must include a Thermal Tip to eliminate flashing;
• The CD-SEM must include an optical microscope 110x for area of interest locating;
• The CD-SEM must measure gratings patterned in photoresist with nominal pitch of 200nm;
• The CD-SEM must have Accelerate Voltage range of 300-1600V, inclusive;
• The CD-SEM must produce SEM Images with the pixel size of 512~2048;
• The CD-SEM must demonstrate a measurement repeatability of +/- 1% of critical dimension value or 1nm (3 sigma);
• The CD-SEM must have a measurement range of 0.05um to 2.0um, inclusive;
• The CD-SEM must have a minimum wafer throughput of 12 wafers per hour;
• The CD-SEM must have a throughput of 40 wafers per hour when double handed;
• The CD-SEM must measure single and multiple features using pattern recognition algorithms;
• The CD-SEM must have metrology applications in automated modes to measure single lines, multiple lines and spaces;
• The CD-SEM must produce output data text files in MSR and convert them to Excel with consolidated results;
• The CD-SEM must transmit digital data and measurement results to a remote host;
• The CD-SEM must create recipes offline and provide uploading to a Data Station for transfer to CD-SEM; and
• The CD-SEM must provide the operator the ability to remove a wafer broken from the load chamber.

Hitachi SU8600 FE-SEM

• The FE-SEM must include a Software Data Manager (SDM) to permit critical dimensioning measurements for direct correlation between the CD-SEM and FE-SEM;
• The FE-SEM must provide a Cold Field Emission feature accessible by computer for controlled flashing;
• The FE-SEM must include a Imaging Resolution better than 0.6nm at 15kV and better than 0.7nm at 1kV;
• The FE-SEM must include a magnification resolution of 20x to 800,000x (polaroid), and 20x to 2,000,000x (display) or better;
• The FE-SEM must produce a beam current up to and exceeding 70nA;
• The FE-SEM must have a chamber configuration to process samples up to 150mm in diameter;
• The FE-SEM must have Advanced Auto-Alignment and Electron Microscopy (EM) Flow for scripting;
• The FE-SEM must have Stage travel with 110mm on X and Y axis, 40mm on Z axis and up to 70 degrees of tilt;
• The FE-SEM must rotate 360 degrees;
• The FE-SEM must include 3 Secondary Electron (SE) Detectors to mix multiple SE components including but not limited to High Angle BSE, Low Angle BSE Signals and Lower SE Detectors for topography imaging;
• The FE-SEM must include an Upper SE Detector for High Resolution Annular Imaging through the lens and a High Angle In-Lens BSE Detector;
• The FE-SEM must have BSE collection down to 50 volts accelerating voltage;
• The FE-SEM must include an External Communication Interface;
• The FE-SEM must include Top Detector Energy Filtration;
• The FE-SEM must include an In Column Mid-detector (IMD);
• The FE-SEM must include a Zigzag montage system with stitching software;
• The FE-SEM must include a 6 channel multi-signal live display;
• The FE-SEM must include an HD image capture that produces at 40,960 x 30,720 pixel size or better; and
• The FE-SEM must share the exact algorithm to characterize critical dimensions as the CD-SEM.

4. Applicability of the trade agreement(s) to the procurement
This procurement is subject to the following trade agreements:
Canadian Free Trade Agreement (CFTA)
World Trade Organization Agreement on Government Procurement (WTO-GPA)
Canada-European Union Comprehensive Economic and Trade Agreement (CETA)
Comprehensive and Progressive Agreement for Trans-Pacific Partnership (CPTPP)
Canada Chile Free Trade Agreement
Canada Colombia Free Trade Agreement
Canada Honduras Free Trade Agreement
Canada Korea Free Trade Agreement
Canada Panama Free Trade Agreement
Canada Peru Free Trade Agreement
Canada Ukraine Free Trade Agreement
Canada United Kingdom Trade Continuity Agreement

5. Justification for the Pre-Identified Supplier
The Hitachi CD-SEM CS4800 and Hitachi SU8600 FE-SEM are the only known tools that meet all of the minimum essential requirements detailed herein. Hitachi is the original equipment manufacturer (OEM) of the tools, owner of all related Intellectual Property and is the only known supplier that can supply tools meeting all of the minimum essential requirements detailed herein.

6. Government Contracts Regulations Exception(s)
The following exception(s) to the Government Contracts Regulations is (are) invoked for this procurement under subsection 6(d) - "only one person is capable of performing the work".

7. Exclusions and/or Limited Tendering Reasons
The following exclusions and/or limited tendering reasons are invoked under the:

• Canadian Free Trade Agreement (CFTA) Article: 513.1(b) (iii);
• World Trade Organization - Agreement on Government Procurement (WTO-AGP) Under the Revised GPA - Article XIII, 1 (b) (iii);
• Canada-European Union Comprehensive Economic and Trade Agreement (CETA) Article 19.12 (b) (iii);
• Comprehensive and Progressive Agreement for Trans-Pacific Partnership

(CPTPP) Article(s): 15.10 , 2 (b) (iii) (s);

• Canada-Chile Free Trade Agreement (CCFTA) Article(s) Kbis-09 (b),Article Kbis-09 (c);
• Canada-Colombia Free Trade Agreement Article(s): 1409 (b) (iii);
• Canada-Honduras Free Trade Agreement Article(s): 17.11 2 (b) (iii);
• Canada-Korea Free Trade Agreement Article 14.3, Under the Revised GPA Article XIII, 1 (b) (iii);
• Canada-Panama Free Trade Agreement Article(s) 16.10 (b) (iii);
• Canada-Peru Free Trade Agreement (CPFTA) Article(s1409 (b) (iii);
• Canada-Ukraine Free Trade Agreement (CUFTA) Article(s Article 10.13 (b) (iii); and
• Canada-United Kingdom Trade Continuity Agreement : refer to CETA as the provisions of CETA are incorporated by reference into and made part of this Agreement. (CETA) Article 19.12 (b) (iii).

8. Ownership of Intellectual Property
Ownership of any Foreground Intellectual Property arising out of the proposed contract will vest in the Contractor.

9. Period of the proposed contract or delivery date
The deliverables must be delivered on or before March 31 2023.

10. Name and address of the pre-identified supplier
Hitatchi High-Tech Canada
89 Galaxy Blvd,
Suite 14
Toronto, ON
M9W 6A4

11. Suppliers' right to submit a statement of capabilities
Suppliers who consider themselves fully qualified and available to provide the goods, services or construction services described in the ACAN may submit a statement of capabilities in writing to the contact person identified in this notice on or before the closing date of this notice. The statement of capabilities must clearly demonstrate how the supplier meets the advertised requirements.

12. Closing date for a submission of a statement of capabilities
The closing date and time for accepting statements of capabilities is 2pm EDT April 1 2022.

13. Inquiries and submission of statements of capabilities
Inquiries and statements of capabilities are to be directed to:
Stephen VanDenHanenberg - Supply Officer
140 O’Connor St.
Ottawa, ON
Telephone: 343-540-8371
E-mail: s••••••••@••••••••.••.ca

Delivery Date: Above-mentioned

You are hereby notified that the government intends to negotiate with one firm only as identified above. Should you have any questions concerning this requirement, contact the contracting officer identified above.

An Advance Contract Award Notice (ACAN) allows departments and agencies to post a notice, for no less than fifteen (15) calendar days, indicating to the supplier community that it intends to award a good, service or construction contract to a pre-identified contractor. If no other supplier submits, on or before the closing date, a Statement of Capabilities that meets the requirements set out in the ACAN, the contracting authority may then proceed with the award. However, should a Statement of Capabilities be found to meet the requirements set out in the ACAN, then the contracting authority will proceed to a full tendering process.

Suppliers who consider themselves fully qualified and available to provide the services/goods described herein, may submit a statement of capabilities in writing to the contact person identified in this Notice on or before the closing date of this Notice. The statement of capabilities must clearly demonstrate how the supplier meets the advertised requirements.

The PWGSC file number, the contracting officer's name and the closing date of the ACAN must appear on the outside of the envelope in block letters or, in the case of a facsimile transmission, on the covering page.

The Crown retains the right to negotiate with suppliers on any procurement.

Documents may be submitted in either official language of Canada.