Trade Agreement: CETA/WTO-AGP/CPTPP/CFTA/FTAs with Peru/Colombia/Panama/Korea/UK
Tendering Procedures: Generally only one firm has been invited to bid
Non-Competitive Procurement Strategy: Exclusive Rights
Comprehensive Land Claim Agreement: No
Vendor Name and Address:
Bruker Nano, Inc.
5465 E Cheryl Pkwy
Madison Wisconsin
United States
53711
Nature of Requirements:
Thin Film Reflectometer Instrument
31184-222194/A
Lajoie, Alexandra
Telephone No. - (416) 434-3879
1. Advance Contract Award Notice (ACAN)
An ACAN is a public notice indicating to the supplier community that a department or agency intends to award a contract for goods, services or construction to a pre-identified supplier, thereby allowing other suppliers to signal their interest in bidding, by submitting a statement of capabilities. If no supplier submits a statement of capabilities that meets the requirements set out in the ACAN, on or before the closing date stated in the ACAN, the contracting officer may then proceed with the award to the pre-identified supplier.
2. Definition of the requirement
The National Research Council Canada (NRC) has a requirement for the supply of a Thin Film Reflectometer, including a stand-alone cabinet to house the reflectometer, all hardware and software, accessories and peripherals, cabling and components, and 1 year warranty including maintenance and support services. The requirement also includes the option to purchase the following additional deliveries on an as and when requested basis: one Robotic cassette-to-cassette wafer handling for 3", 4", and 6" wafer; and one Pre-aligner and cassette mapper. The NRC requires the FilmTek 2000M Thin Film Reflectometer as a key instrument in the fabrication of semiconductor devices.
3. Criteria for assessment of the Statement of Capabilities (Minimum Essential Requirements)
Any interested supplier must demonstrate by way of a statement of capabilities that its product meets the following requirements:
1. Thin Film Reflectometer Instrument:
- The instrument must provide automated thin-film metrology.
- The instrument must have an extensive thin film Database, which includes but is not limited to photoresists, dielectrics, semiconductors, and metals.
- The instrument must have an automated turret controlled by recipe.
- The instrument must have auto-focus.
- The instrument must have pattern recognition.
- The instrument must have an automated X-Y stage for up to 6" x 6" movement and joystick.
- The instrument must have a camera and accessories for viewing the measurement site on the computer monitor.
- The instrument must have recipe controls of: 5x objective for a spot size not larger than10µm x 20µm; 10x objective for a spot size not larger than 5µm x 10µm; 20x objective for a spot size not larger than 2.5µm x 5µm; and 50x objective for a spot size not larger than 1µm x 2µm.
- The instrument must have a multi-core processor with Windows TM 10 operating system or a more recent version.
- The instrument must have an interface software for the measurement of multi-layer thickness and critical dimensions. The software must provide statistical results of these measurements across the samples and wafers being measured.
- The instrument must have a film thickness range from 3nm to 150µm
- The instrument must have a film thickness accuracy of ±1.5Å for NIST traceable standard oxide 1000Å to 1µm.
- The instrument must have a spectral range of =1000nm
- The instrument must have a sample size of 5mm Pieces and 50mm to 150mm wafers.
- The instrument must have a spectral resolution of 0.3nm-2nm
- The instrument must have a regulated halogen lamp (2,000 hrs lifetime) life source.
- The instrument must have a detector type of 2048 pixel Sony linear CCD array / 512 pixel cooled Hamamatsu InGaAs CCD array (NIR).
- The instrument must have a measurement time of
