The National Research Council (NRC) of Canada requires the purchase of stainless-steel double-melt tubing and peripherals to be used as part of our semiconductor facility for corrosive / hazardous gas lines. They will be used for the installation of the KLA-SPTS Omega Etch Cluster Tool, the Aixtron G10-AsP Metal Organic Chemical Vapour Deposition Tool and infrastructure, needed to supply a variety of fabrication-supporting tools and equipment for this new build. It will also include connecting the new gas lines to existing bulk distribution systems and gas panels.
The Contractor must provide stainless steel double-melt tubing and peripherals listed below:
a. Coaxial tube, VIM/VAR, 1/4"IN X 1/2" OUT, 401, 316L
b. Coaxial tube, VIM/VAR, 1/2"IN X 3/4" OUT, 401, 316L
c. Tube, VIM/VAR, 3/4"X0.065, 401, 316L,10Ra
d. Tube, VIM/VAR, 1/4" X 0.035, 401, 316L, 10Ra
e. Tube, VIM/VAR, 1"X.065, 401, 10RA, 316L
f. Tube, VIM/VAR, 1-1/2"X.065, 401, 10RA, 316L
g. Tube, VIM/VAR, 1/2"X.049, 401, 10RA, 316L
h. 1/4" coaxial VIM/VAR Tees, 401, 316L, 5Ra
i. 1/4" VIM/VAR Tees, 401, 316L, 10Ra
j. 1/4" coaxial sleeves 6” long, 316L
k. 1/2" coaxial sleeve, 316L
l. 1/2" coaxial terminator, process, 401, 316L, 10Ra
m. 1/4" coaxial terminator, process, 401, 316L, 10Ra
n. 1/2" 90-degree coaxial VIM/VAR elbow, 401, 316L, 10Ra
o. 1/2" 45-degree coaxial VIM/VAR elbow, 401, 316L, 10Ra
p. 1-1/2" 90-degree, VIM/VAR, elbow 401, 316L, 10RA
q. 1-1/2" 45-degree, VIM/VAR, elbow 401, 316L, 10RA
r. 1" 90-degree, VIM/VAR, elbow 401, 316L, 10RA
s. 1" 45-degree, VIM/VAR, elbow 401, 316L, 10RA
t. 1-1/2" X 1" conc reducer, VIM/VAR, 401, 316L, 10RA
u. 1" X 1/2" conc reducer, VIM/VAR, 401, 316L, 10RA
v. 1-1/2" tees, VIM/VAR, 401, 316L, 10RA
w. 1-1/2" X 1" reducing tees, VIM/VAR, 401, 316L, 10RA
x. 1-1/2" X 1/2" reducing tees, VIM/VAR, 401, 316L, 10RA
x. 1" X 1/2" reducing tees, VIM/VAR, 401, 316L, 10RA
y. 1” end cap, VIM/VAR, 401, 316L, 10Ra
z. 1-1/2" end cap, VIM/VAR, 401, 316L, 10Ra
aa. 1/2" end cap, VIM/VAR, 401, 316L, 10Ra
